Microassembly
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The use of microsystems
requires an interface between the macroscopic world / the user and
the microsystem. Many microsystems demand special assembly techniques
in order to reach high precisson on the one hand and on the other
hand often a special handling to guarentee the functionality of
the microsystem.
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Microtechnical
plugging system
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This
plugging system has been realized for the assembly of two
different micro parts which could not be glued together. The
tolerance of the assembly was less than 5 µm.
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The
smalles burr puzzle of the world
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Our burr puzzle consists of six single parts which have to
be assembled in a specific order. The parts are microtechnically
fabricated of metal with the help of a photoresist with a
high aspect ratio. The length of each single part is 600 µm
and the cross sectional area is 100 µm * 100 µm.
Assembly
intstructions for the burr puzzle! |
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Optical
probe assembled on a glass fibre
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This example of a micro assembly shows a probe for nearfield
scanning optical microscopy. The probe is manufactured in
high numbers on wafer level. The probe is fabricated on a
circular membrane attached to two arms with potential break
points bridging an aperture in the silicon wafer. The next
step is the assembly of the probe onto the end face of a mono
mode glas fibre. This is been done by semi automatic alignment
of the glas fibre below the probe. A Laser beam is coupled
into the fibre and the light intensity passing the probe is
maximized by horizontal positioning of the glas fibre.
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