Micromotive - Mikrotechnik > Technologie

<body bgcolor="#FFFFFF" text="#000000"> <table width="100%" border="0" cellpadding="0" cellspacing="0" bgcolor="#FFFFFF"> <tr> <td width="800"> <table width="100%" border="0" cellpadding="0" cellspacing="0" bgcolor="#D3DDFF"> <tr> <td height="20" valign="top" bgcolor="#CCCCCC" width="84"><a href="index.php" target="_top"><img src="Grafiken/Deutsch_d.GIF" width="84" height="20" border="0" name="Deutsch" alt="Deutsch"></a></td> <td valign="middle" width="1" align="right" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td valign="middle" width="55" id="Home" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="index_e.php" target="_top"><img src="Grafiken/Home_d.gif" width="54" height="20" border="0" name="Home" alt="Home"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="81" valign="middle" id="Unternehmen" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Company_e.php" target="_top"><img src="Grafiken/Company_d.gif" width="80" height="20" border="0" name="Company" alt="Company"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="109" valign="middle" id="Mikrotechnik" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Microsystems_e.php" target="_top"><img src="Grafiken/Microsystems_d.gif" width="108" height="20" border="0" name="Microsystems" alt="Microsystems"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="94" valign="middle" id="Technologie" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Technology_e.php" target="_top"><img src="Grafiken/Technology_l.gif" width="93" height="20" border="0" name="Technology" alt="Technology"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="75" valign="middle" id="Produkte" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Products_e.php" target="_top"><img src="Grafiken/Products_d.gif" width="74" height="20" border="0" name="Products" alt="Products"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="66" valign="middle" id="Service" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Service_e.php" target="_top"><img src="Grafiken/Service_d.gif" width="65" height="20" border="0" name="Service" alt="Service"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="67" valign="middle" id="Kontakt" align="center" bgcolor="#CCCCCC"> <p><a href="Contact_e.php" target="_top"><img src="Grafiken/Contact_d.gif" width="67" height="20" border="0" name="Contact" alt="Contact"></a></p> </td> </tr> </table> </td> </tr> </table> <table width="660" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="40" height="56" valign="top"> </td> <td colspan="9" valign="top"> <font face="Arial, Helvetica, sans-serif" size="6" color="#999999">Technology</font> <hr size="2" noshade> </td> <td width="20"></td> </tr> <tr> <td height="20" colspan="2" valign="top"> </td> <td valign="top" align="left" colspan="2"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Processes_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Standard processes</font></a></font></b></font></td> <td valign="top" colspan="2" align="left"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Silicon_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Silicon technology</font></a> </font></b></font></td> <td valign="top" colspan="3"><b><font size="2" face="Arial, Helvetica, sans-serif"><a href="SU8_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Thick film technolog</font></a>y</font></b></td> <td width="146"></td> <td></td> </tr> <tr> <td height="20" colspan="3" valign="top"> </td> <td valign="top" colspan="2"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Microtips_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Microtips</font></a></font></b></font></td> <td valign="top" colspan="2"><font face="Arial, Helvetica, sans-serif" size="2"><b><a href="Ultraflat_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Flat technology</font></a></b></font></td> <td width="130" valign="top"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Microassembly_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Microassembly</font></a></font></b></font></td> <td width="10"></td> <td></td> <td></td> </tr> <tr> <td height="14"></td> <td width="12"></td> <td width="13"></td> <td width="132"></td> <td width="14"></td> <td width="126"></td> <td width="17"></td> <td></td> <td></td> <td></td> <td></td> </tr> </table> <table width="660" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="40" height="20"></td> <td width="600"></td> <td width="20"></td> </tr> <tr> <td height="1069"></td> <td valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td height="20" valign="middle" width="600"> <h4><font face="Arial, Helvetica, sans-serif">Microassembly</font></h4> </td> </tr> <tr> <td height="86" valign="top"> <div align=justify> <font color=#000000 size=2 face="Thaoma, Arial, Helvetica, sans-serif"> <font face="Arial, Helvetica, sans-serif">The use of microsystems requires an interface between the macroscopic world / the user and the microsystem. Many microsystems demand special assembly techniques in order to reach high precisson on the one hand and on the other hand often a special handling to guarentee the functionality of the microsystem.</font></font> </div> </td> </tr> <tr> <td height="35" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" valign="top"> </td> <td width="590" height="35" valign="top"> <div align=justify> <h5><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif"> <b><font face="Arial, Helvetica, sans-serif">Microtechnical plugging system</font></b></font></h5> </div> </td> </tr> </table> </td> </tr> <tr> <td height="170" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="150" valign="top"> </td> <td width="273" valign="top"><img src="Grafiken/Fischer.jpg" width="209" height="150" alt="Micro plugging system"></td> <td width="317"></td> </tr> <tr> <td height="20"></td> <td></td> <td></td> </tr> </table> </td> </tr> <tr> <td height="131" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="96" valign="top"> </td> <td width="590" valign="top"> <div align=justify> <font size="2" face="Arial, Helvetica, sans-serif">This plugging system has been realized for the assembly of two different micro parts which could not be glued together. The tolerance of the assembly was less than 5 µm.</font></div> </td> </tr> <tr> <td height="35" valign="top"> </td> <td valign="top"> <h5><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif"><b><font face="Arial, Helvetica, sans-serif">The smalles burr puzzle of the world</font></b></font></h5> </td> </tr> </table> </td> </tr> <tr> <td height="170" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="150" valign="top"> </td> <td width="310" valign="top"><img src="Grafiken/Knoten.jpg" width="193" height="150" alt="Micro burr puzzle"></td> <td width="280" valign="middle" align="center"><img src="Grafiken/Teile_Knoten.jpg" width="212" height="150" alt="Parts of the burr puzzle"></td> </tr> <tr> <td height="20"></td> <td></td> <td></td> </tr> </table> </td> </tr> <tr> <td height="155" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="120" valign="top"> </td> <td width="590" valign="top"> <div align=justify> <font size="2" face="Arial, Helvetica, sans-serif"> Our burr puzzle consists of six single parts which have to be assembled in a specific order. The parts are microtechnically fabricated of metal with the help of a photoresist with a high aspect ratio. The length of each single part is 600 µm and the cross sectional area is 100 µm * 100 µm. <br> <br> </font></div> <font size=2 face="Verdana, Tahoma, Helvetica, sans-serif"><a href="javascript:Anleitung()">Assembly intstructions for the burr puzzle!</a></font> </td> </tr> <tr> <td height="35" valign="top"> </td> <td valign="top"> <h5><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif"><b><font face="Arial, Helvetica, sans-serif">Optical probe assembled on a glass fibre</font></b></font></h5> </td> </tr> </table> </td> </tr> <tr> <td height="170" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="150" valign="top"> </td> <td width="310" valign="top"><img src="Grafiken/Fibertip.jpg" width="214" height="150" alt="Microassembled optical probe"></td> <td width="280" valign="top" align="center"><img src="Grafiken/Montage.jpg" width="221" height="150"></td> </tr> <tr> <td height="20"></td> <td></td> <td></td> </tr> </table> </td> </tr> <tr> <td height="112" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="62" valign="top"> </td> <td width="590" valign="top"> <div align=justify> <font size="2" face="Arial, Helvetica, sans-serif"> This example of a micro assembly shows a probe for nearfield scanning optical microscopy. The probe is manufactured in high numbers on wafer level. The probe is fabricated on a circular membrane attached to two arms with potential break points bridging an aperture in the silicon wafer. The next step is the assembly of the probe onto the end face of a mono mode glas fibre. This is been done by semi automatic alignment of the glas fibre below the probe. A Laser beam is coupled into the fibre and the light intensity passing the probe is maximized by horizontal positioning of the glas fibre.</font></div> </td> </tr> </table> </td> </tr> <tr> <td height="20"></td> </tr> </table> </td> <td></td> </tr> <tr> <td height="16"></td> <td></td> <td></td> </tr> </table> </body>