Microtips
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Micromotive plays a leading
role in the production of microtips for example used in the scanning
probe microscopy. This comprises pure isotropical etched tips as
well as tips with one or more films which have an aperture at the
very end of the tip. This allows the modification of tips for different
functions.
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Conical tips
made of one material
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Isotropical etched tips can be manufactured out of monocrystaline
silicon or amorphous silicon nitride. For silicon tips minimal
tip radii of 10 nm can be achieved. Typical radii of nitride
tips are in the range of 20-30 nm. Tiphights are in the range
of 1 to a few micrometer.
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Conical
tips
with coating
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In order to serve various purposes the tip can be coated with
different metals or dielectrical material such as silicon
oxide and have an aperture at the very end of the tip. The
aperture can vary around several 100 nm.
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Conical tip with double coating
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If the tip is covered with more than one coating, special
processes allow the selective opening of the different coatings.
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