Thick film technology
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With the help of modern
negative resists such as SU-8 it is possible to create microstructures
between a small number of µm
up to 1 mm thickness with an aspect ratio bigger than 10. The mechanical
properties of this negative restist allow the production of microtechnical
essential elements. However, SU-8 can also be used to give shape
to galvanic structures which serve as mould
for micro
injection moulding or
which fulfil electromagnetic functions.
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Single- and
multistep structures
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One can fabricate any SU-8-structures on silicon wafers .
These parts can be single- or multistep structured. It is
possible to divide the structures from the silicon carrierer
afterwards.
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Metallic
structures with SU-8 as isolator
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By
depositing metals within the ditches between the SU-8 structures
electrically conductive structures can be generated. These
are isolated from each other with the help of SU-8. Such
coil systems constitute as functional elements in micro
actuators and sensors. One can also fabricate metallic parts
like gearwheels with this technology.
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Metallic structures in SU-8 film
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The mechanical properties of SU-8 can also be used to create
detached film-like parts.
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